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리소그래피를 넘어선 3D 스케일링, 소재에 새로운 요구사항 제기

EE Times · 2026.10.15 03:29 · 원문 사이트
🇰🇷 한글 번역
스티븐 소포: 수십 년간 반도체 스케일링은 주로 치수를 축소하는 측면에서 설명되어 왔다. 그러나 로직 및 메모리 구조가 수평적일 뿐만 아니라 수직적으로도 점차 확장됨에 따라, 인쇄
📄 원문 (English)
Stephen Sopko For decades, semiconductor scaling has been described largely in terms of shrinking dimensions. But as logic and memory structures increasingly extend vertically as well as laterally, printing
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